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TMFC mass flow meter/controller-FOB T/T

Model No.
TMFC30V-4AVF-N2
Made in
Taiwan
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Spec

  • Flow range:0sccm~30SLM, 100SLM~300SLM, 10sccm~50SLM, 300SLM~1000SLM, 30SLM~100SLM
  • flow type:N2

Key Features

TMFC SERIER

Thermal Mass Flow Controller

Specifictions

 

·         Highly Accuracy at Low Flow

·         Fast Response(1.0)

·         Wide Pressure Range Available(1300 PSIG)

·         No Leakage

·         No Temperature or Pressure Required

·         Connection compatible

·         High stable removable sensor

·         Corrosion resistance Value

·         Excellent Linearity

·         Excellent long term Stability

·         Modular design

·         Compact Flow Control System

Model

TMFC30V

TMFC30A

TMFC50V

TMFC50A

Flow Range(N2)

10sccm~30SLM

10sccm~30SLM

10scc~50SLM

10scc~50SLM

Response Time

1.0 sec

Accuracy

±1.0 % FS

Repeatability

±0.25 % FS

Proof Pressure

1300 PSIG

Leak rate

1 x 10-9 atm.cc/sec or less

Working temperature Range

0~50

Materials of parts in contact w/gases

Body:SUS316

Valve seat:Vition(Option Bura or Kalrez or Teflon)

Joint

Standard:1/4 compression

Option: 1/8 compression,1/4 VCR,3/8 Compression,VCR

Electrical connections

Dsub 15-pin male connector per standards

Flow rate input signals

0~5 Vdc

4~20mA

0~5 Vdc

4~20mA

Flow rate output signals

0~5 Vdc

4~20mA

0~5 Vdc

4~20mA

required power supply

15~28 Vdc/350mA

 

Product Certification

Payment Details

  • Minimum Order:1
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